MOCVDlabPastStatus
-- BobVitale? - 22 Aug 2007
8/3/07: Meeting between Rizik, Wenbo Yuan, Vitale and new campus Fire Marshall
8/1/07: Phone conf between Rizik, Vitale and Gary & Gary of Structure Materials. Many questions asked and answered. A list of questions and concerns about various options is forwarded to Prof Nobby who is in Hong Kong.
7/31/07: A short list of questions forwarded to Prof Nobby for meeting between Rizik and Structure Materials.
7/10/07: Drawing of 2nd floor location sent to Structure Materials Inc (SMI). SMI asked UCSC to measure elevator and walk a mockup through to verify MOCVD unit will clear obstructions. UCSC made mockup and walked it from loading dock to BE-258. Mockup (44'widex88"longx76.5in high) fit through space, turn into BE-258 had least room (3-4in clearance).
From SMI, Gary Provost)
Thank you for the drawing. Upon review we do not have any major problems with the second floor location. Our planned frame size is 44" wide x 88" long x 81" high (with removable feet it has a 76.5" clearance for the elevator) We have in the past made a cardboard mask of the reactor footprint and carried it through the facility to verify the path. The reactor frame has wheels incorporated into it (at the 76.5" height). The frame can be moved without need of other equipment. Once placed within the Lab the frame will need to be raised ( pallet jack , ok) and the feet installed. 7/4/07 - Email reply from IES - Rizik Michael. He reviewed system and abatement plan and came back with many recommendations for exhaust. 7/2/07 - SMI provided drawings of system with comments/questions below:
1. Auto CAD drawing of MOCVD reactor and all ancillary support equipment: top, front and end views with dimensions, weight and center of gravity. Attached are two general Solid Works images of the system with major dimensions defined in a word document. The weight should not be more than 2000 pounds. The center of gravity is not defined until the system is assembled with all options in place and even then it is only an estimate. We can provide the e-viewer of the instrument if useful. CAD drawing will not be released until all options are specified in the order and accepted. 2. Facilitization requirements for tool installation with point of connection of all services. This shall include: N2, CDA, H2, cooling water, exhaust, vacuum pump fore line, and process gases connections with minimum supply pressure, flow rate and port size. Also, please indicate the maximum recommended distance between the reactor and the vacuum pump. The attached drawing shows rough locations of inlets and outlets, these are generally specified at purchase design review since we have ability to adjust the exact positions in response to purchaser needs. I believe all gas connections are specified between the text and the gas panel schematic. The absolute maximum flow is 15 slm; but in practice would be a couple slm. 3. General understanding of Organo-metallic liquids' ampoules' location relative the reactor. Will these ampoules be placed in a chilled water bath for temperature control within the reactor assembly or will they be place within a gas box mounted on the reactor frame? General bubbler/ampoule location is shown in the figure - final placement will be made at final design, especially with respect to switching manifold and ALD minimum volume operation. The ampoules are either in baths or if trying to minimize cost, there are other low cost TE/bath options we offer. As will be seen from the image, we mount the ampoules and so forth within the general system frame. However, cylinder gas source are mounted externally by the customer - typically in gas cabinets or gas racks. 4. General understanding of how unreacted Organo metallic vapors will be condensed and trapped within the tool's assembly? I have a concern over potential condensation of these liquids in the vacuum pumps' discharge vent pipe as well as deposition of reaction by-product particulates, which eventually clog the pipe. Attached is a write-up of how toxic gas absorption can be dealt with in an option we provide. In general, reactants predominantly react in the hot zone; however, in ALD this may not be the case since significant amounts of vapor may pass through the system. Some is likely to saturate the pump fluid; in which case care should be taken to keep the ballast in use to minimize this condensation and to flow H2, Inert of oxygen between operation. CARE also is needed when switching between reducing atmospheres and oxidizing atmospheres as any dissolved gases could react exothermically - potentially violently. Vapors that pass through the pump generally condense on the activated charcoal, which is periodically oxidized in a controlled manner to prevent overheating. Clogging is always a possibility due to particle buildup; however, at the flow rates used one can estimate the materials consumed, the amounts needed to plug a tube if 100% were to go into plugging the tube. One other added safety feature that could be added to the system is a pump outlet pressure gauge, which could be monitored along with other deviation alarms. Periodically, the oxidized absorbed species will need to be emptied along with the activated charcoal; at these times the system plumbing should be inspected and cleaned as needed as well. The exhaust tubing is set at 1.5" diameter. 6/26/07 - IES, GLP and Ricker asked for a list of alternative sites in BE to review. Vitale drafted a document with Asst Dean Winans input. Sent to IES, GLP and Dean Ricker. 6/25/07 - IES and GLP meeting Monday 6/25 3-5pm in SF to discuss design and requirements.
6/19/07 - Project presented to UCSC ACF by Vitale and Dean Issacson as an informational item. We will be coming back with the official project after the study is completed by IES and we have settled on design and understand costs. 6/14/07 - IES, GLP, UCSC meeting with Fire Marshal, understand safety scope of building. We learned that Baskin has 2 existing zones (Cleanroom, Alts2/3 area). The remainder of building is all one zone. A revised list of chemicals was presented via email from Nobby. The new list had some increased quantities.
5/3/07 - PP&C assemblying engineering team, EH&S and SOE assembling list of chemicals in BE for Fire Marshal official review. Nobby working with vendor to reduce ventillation requirements for machine.
Thank you for the drawing. Upon review we do not have any major problems with the second floor location. Our planned frame size is 44" wide x 88" long x 81" high (with removable feet it has a 76.5" clearance for the elevator) We have in the past made a cardboard mask of the reactor footprint and carried it through the facility to verify the path. The reactor frame has wheels incorporated into it (at the 76.5" height). The frame can be moved without need of other equipment. Once placed within the Lab the frame will need to be raised ( pallet jack , ok) and the feet installed. 7/4/07 - Email reply from IES - Rizik Michael. He reviewed system and abatement plan and came back with many recommendations for exhaust. 7/2/07 - SMI provided drawings of system with comments/questions below:
1. Auto CAD drawing of MOCVD reactor and all ancillary support equipment: top, front and end views with dimensions, weight and center of gravity. Attached are two general Solid Works images of the system with major dimensions defined in a word document. The weight should not be more than 2000 pounds. The center of gravity is not defined until the system is assembled with all options in place and even then it is only an estimate. We can provide the e-viewer of the instrument if useful. CAD drawing will not be released until all options are specified in the order and accepted. 2. Facilitization requirements for tool installation with point of connection of all services. This shall include: N2, CDA, H2, cooling water, exhaust, vacuum pump fore line, and process gases connections with minimum supply pressure, flow rate and port size. Also, please indicate the maximum recommended distance between the reactor and the vacuum pump. The attached drawing shows rough locations of inlets and outlets, these are generally specified at purchase design review since we have ability to adjust the exact positions in response to purchaser needs. I believe all gas connections are specified between the text and the gas panel schematic. The absolute maximum flow is 15 slm; but in practice would be a couple slm. 3. General understanding of Organo-metallic liquids' ampoules' location relative the reactor. Will these ampoules be placed in a chilled water bath for temperature control within the reactor assembly or will they be place within a gas box mounted on the reactor frame? General bubbler/ampoule location is shown in the figure - final placement will be made at final design, especially with respect to switching manifold and ALD minimum volume operation. The ampoules are either in baths or if trying to minimize cost, there are other low cost TE/bath options we offer. As will be seen from the image, we mount the ampoules and so forth within the general system frame. However, cylinder gas source are mounted externally by the customer - typically in gas cabinets or gas racks. 4. General understanding of how unreacted Organo metallic vapors will be condensed and trapped within the tool's assembly? I have a concern over potential condensation of these liquids in the vacuum pumps' discharge vent pipe as well as deposition of reaction by-product particulates, which eventually clog the pipe. Attached is a write-up of how toxic gas absorption can be dealt with in an option we provide. In general, reactants predominantly react in the hot zone; however, in ALD this may not be the case since significant amounts of vapor may pass through the system. Some is likely to saturate the pump fluid; in which case care should be taken to keep the ballast in use to minimize this condensation and to flow H2, Inert of oxygen between operation. CARE also is needed when switching between reducing atmospheres and oxidizing atmospheres as any dissolved gases could react exothermically - potentially violently. Vapors that pass through the pump generally condense on the activated charcoal, which is periodically oxidized in a controlled manner to prevent overheating. Clogging is always a possibility due to particle buildup; however, at the flow rates used one can estimate the materials consumed, the amounts needed to plug a tube if 100% were to go into plugging the tube. One other added safety feature that could be added to the system is a pump outlet pressure gauge, which could be monitored along with other deviation alarms. Periodically, the oxidized absorbed species will need to be emptied along with the activated charcoal; at these times the system plumbing should be inspected and cleaned as needed as well. The exhaust tubing is set at 1.5" diameter. 6/26/07 - IES, GLP and Ricker asked for a list of alternative sites in BE to review. Vitale drafted a document with Asst Dean Winans input. Sent to IES, GLP and Dean Ricker. 6/25/07 - IES and GLP meeting Monday 6/25 3-5pm in SF to discuss design and requirements.
6/19/07 - Project presented to UCSC ACF by Vitale and Dean Issacson as an informational item. We will be coming back with the official project after the study is completed by IES and we have settled on design and understand costs. 6/14/07 - IES, GLP, UCSC meeting with Fire Marshal, understand safety scope of building. We learned that Baskin has 2 existing zones (Cleanroom, Alts2/3 area). The remainder of building is all one zone. A revised list of chemicals was presented via email from Nobby. The new list had some increased quantities.
5/3/07 - PP&C assemblying engineering team, EH&S and SOE assembling list of chemicals in BE for Fire Marshal official review. Nobby working with vendor to reduce ventillation requirements for machine.